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Semiconductor manufacturing handbook [electronic resource] / Hwaiyu Geng, editor in chief.

Colaborador(es): Geng, Hwaiyu | Zhou, Lin | Park, Ilsun | Ravi, K. V | Rathore, Hazara S | Chanda, Kaushik | Ren, L. P | Tu, King N | Coumou, David J | Biltoft, Peter | Howard, Charles | Mack, Chris A | Graf, Michael | Zhang, Peng | Lai, Shouliang | Solzbacher, Florian | McInerney, Edward J | Ramdani, Jamal | Vaccari, Giovanni | Ritzdorf, Tom | Klocke, John | Dyer, Timothy S | Machamer, Andrew | Blair, Donald W | Arai, Kazuhisa | Kobayashi, Yoshikazu | Otani, Hideaki | Tonnies, Dietrich | Topper, Michael | Wang, Zhong L | Huff, Michael A | Liu, David N | Curcie, Wayne D | Sweeney, Joseph D | Cox, James C | Cavicchi, Kristin | Barsness, Dan | Gould, Charles K | Albrecht, David J | Li, Bo | Carriker, Wayne | Haris, Clint | Peltinov, Ram | Menaker, Mina | Scibilia, Bruno | Altis, Yoan Dupret | McCafferty, Robert H | Davis, Brett J | Trammell, Steven R | Pavlotsky, Richard V | Beck, Stephen C | Gendreau, Michael | Amick, Hal | Levit, Larry | Muller, Chris | Kochevar, Steven | Gromala, Jerry | Pinkowski, Richard E | IDC Corporation.
Tipo de material: TextoTextoSeries McGraw-Hill's AccessEngineering: Editor: New York : McGraw-Hill, [2005]Descripción: 1 electronic text : ill.ISBN: 0071468153; 9780071445597.Tema(s): Semiconductors -- Design and construction | Integrated circuits -- Design and construction | Semiconductors -- Materials | Integrated circuits -- Reliability | Dielectrics | Silicides | Plasma engineering | Process control | Vacuum techology | Integrated circuits -- Masks | Microlithography | Ion implantation | Rapid thermal process | Plasma etching | Etching | Physical vapor deposition | Chemical vapor deposition | Epitaxy | Electrolytic polishing | Semiconductors -- Polishing | Semiconductors -- Cleaning | Grinding and polishing | Microelectronic packaging | Electronic packaging | Nanotechnology | Microfabrication | Microelectromechanical systems | Flat panel displays | Gases | Waste gases -- Purification | Hydraulic conveying | Slurry pipelines | Chemical plants -- Waste disposal | Water-supply engineering | Materials handling | Metrology | Six sigma (Quality control standard) | Semiconductor industry -- Environmental aspects | Semiconductor industry -- Health aspects | Semiconductor industry -- Safety measures | Clean rooms -- Design and construction | Vibration | Noise control | Static eliminators | Electrostatics | Airborne infection | Air -- Pollution | Sewage -- Purification -- NeutralizationGénero/Forma: Electronic books. | Internet resources.Clasificación CDD: 621.3815/2 Recursos en línea: Subscription required Also issued in print and PDF version.
Contenidos:
http://www.loc.gov/catdir/enhancements/fy0624/2005045580-t.html
Pt. 1. Semiconductor fundamentals and basic materials -- pt. 2. Wafer processing -- pt. 3. Final manufacturing -- pt. 4. Nanotechnology, EMS, and FPD -- pt. 5. Gases and chemicals -- pt. 6. Fab yield, operations, and facilities.
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Recurso Electrónico Recurso Electrónico Biblioteca Fundación Área Andina - Medellín
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Print version c2005.

Includes bibliographical references and index.

http://www.loc.gov/catdir/enhancements/fy0624/2005045580-t.html

Pt. 1. Semiconductor fundamentals and basic materials -- pt. 2. Wafer processing -- pt. 3. Final manufacturing -- pt. 4. Nanotechnology, EMS, and FPD -- pt. 5. Gases and chemicals -- pt. 6. Fab yield, operations, and facilities.

Also issued in print and PDF version.

Contributor biographical information:

http://www.loc.gov/catdir/enhancements/fy0624/2005045580-b.html

Description based on cover image and table of contents, viewed on May 4, 2007.


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